Hiwin LMSP

Design

Motor - Forcer: hybrid planar motor

Stator: integral grid platen

Support - Air bearing

Position sensing - Direct feedback through position sensors in 3 axes (X1/X2/Y)

Control – Position: Direct feedback servo control of X, Y and yaw error

Commutation control: Amplitude/phase control using 2-phase sine wave linear amplifier

Motor

Max. force - 75 N / 140 N

Max. speed - 0.9m/s / 0.8m/s

Forcer weight - 1.8 kg / 3.7 kg

Max. Load - 14 kg / 28 kg

Air flow rate - 6.4 liter/min / 21 liter/min

Air supply pressure for bearing - 3.0±0.3bar

XY stage accuracy - ±15 µ m

Position sensor resolution - X,Y: 1 µ m

Yaw: 0.8 arc-second

Positioning resolution - X.Y: 1 µ m

Repeatability - X.Y: 3 µ m